Publications

MIT Lincoln Laboratory has developed InP/InGaAsP Geiger-Mode Avalanche Photodiodes and associated readout integrated circuits (ROICs) that have enabled numerous active optical systems over the past decade. Framed and asynchronous photon timing ROIC architectures have been demonstrated. In recent years, efforts at MITLL have focused on technology development to advance the...

We review recent advances in the development of slab-coupled optical waveguide (SCOW) devices, progress toward a flexible photonic integration platform containing both conventional high-confinement and SCOW ultra-low confinement devices, and applications of this technology.

An asynchronous readout integrated circuit (ROIC) has been developed for hybridization to a 32x32 array of single-photon sensitive avalanche photodiodes (APDs). The asynchronous ROIC is capable of simultaneous detection and readout of photon times of arrival, with no array blind time. Each pixel in the array is independently operated by...

We review the development of a new class of high-power, edge-emitting, semiconductor optical gain medium based on the slab-coupled optical waveguide (SCOW) concept. We restrict the scope to InP-based devices incorporating either InGaAsP or InGaAlAs quantum-well active regions and operating in the 1.5-μm-wavelength region. Key properties of the SCOW gain...

Uni-traveling-carrier waveguide photodiodes (PDs) with a variable optical confinement mode size transformer are demonstrated. The optical mode is large at the input for minimal front-end saturation and the mode transforms as the light propagates so that the absorption profile is optimized for both high-power and high-speed performance. Two differently designed...

In this paper we study the uniformity of up to 150 mm in diameter wafer-scale III-V epitaxial transfer to the Si-on-insulator substrate through the O2 plasma-enhanced low-temperature (300°C) direct wafer bonding. Void-free bonding is demonstrated by the scanning acoustic microscopy with sub-um resolution. The photoluminescence (PL) map shows less than...

The semiconductor slab-coupled optical waveguide (SCOW) concept is a versatile device platform that has enabled new classes of high-power, low-noise single-frequency lasers, mode-locked lasers, optical amplifiers, and photodiodes for analog optical links and photonic analog-to-digital converters.

In this work, we modified our wafer-scale 3D integration technique, originally developed for Si, to hybridize InP-based image sensor arrays with Si readout circuits. InGaAs image arrays based on the InGaAs layer grown on InP substrates were fabricated in the same processing line as silicon-on-insulator (SOI) readout circuits. The finished...

We demonstrate the transfer of the largest (150 mm in diameter) available InP-based epitaxial structure to the silicon-on-insulator substrate through a direct wafer-bonding process. Over 95% bonding yield and a void-free bonding interface was obtained. A multiple quantum-well diode laser structure is well-preserved after bonding, as indicated by the high-resolution...

We have developed and demonstrated a highduty- cycle asynchronous InGaAsP-based photon counting detector system with near-ideal Poisson response, roomtemperature operation, and nanosecond timing resolution for near-infrared applications. The detector is based on an array of Geiger-mode avalanche photodiodes coupled to a custom integrated circuit that provides for lossless readout via...