Publications

Radiation effects are presented for the first time for vertically integrated 3 x 64 -kb SOI SRAM circuits fabricated using the 3D process developed at MIT Lincoln Laboratory. Three fully-fabricated 2D circuit wafers are stacked using standard CMOS fabrication techniques including thin-film planarization, layer alignment and oxide bonding. Micron-scale dense 3D vias are fabricated to interconnect circuits between tiers. Ionizing dose and single event effects are discussed for proton irradiation with energies between 4.8 and 500 MeV. Results are compared with 14-MeV neutron irradiation. Single event upset cross section, tier-to-tier and angular effects are discussed. The interaction of 500-MeV protons with tungsten interconnects is investigated usingMonte-Carlo simulations. Results show no tier-to-tier effects and comparable radiation effects on 2D and 3D SRAMs. 3DIC technology should be a good candidate for fabricating circuits for space applications.

Effects of ionizing radiation on single event transients are reported for Fully Depleted SOI (FDSOI) technology using experiments and simulations. Logic circuits, i.e. CMOS inverter chains, were irradiated with cobalt-60 gamma radiation. When charge is induced in the n-channel FET with laser-probing techniques, laser-induced transients widen with increased total dose. This is because radiation causes charge to be trapped in the buried oxide, and reduces the p-channel FET drive current. When the p-channel FET drive current is reduced, the time required to restore the output of the laser-probed FET back to its original condition is increased, i.e. the upset transient width is increased. A widening of the transient pulse is also observed when a positive bias is applied to the wafer without any exposure to radiation. This is because a positive wafer bias reproduces the shifts inFET threshold voltages that occur during total dose irradiation. Results were also verified with heavy ion testing and mixed mode simulations.