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Directly deposited optical-blocking filters for single-photon x-ray imaging spectroscopy

Published in:
J. Astron. Telesc. Instrum. Syst., Vol. 3, No. 3 (2017), 036001.

Summary

Directly deposited optical-blocking filters (DD OBFs) have the potential to improve filter performance and lower risk and cost for future x-ray imaging spectroscopy missions. However, they have not been fully characterized on high-performance charge coupled devices (CCDs). This paper reports the results of DD OBFs processed on high-performance photon-counting CCDs. It is found that CCD performance is not degraded by deposition of such filters. X-ray and optical transmission through the OBF is characterized and found to match theoretical expectation. Light-leaks through pinholes and the side and back surfaces are found to lower the optical extinction ratio; various coating processes are developed to resolve these issues.
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Summary

Directly deposited optical-blocking filters (DD OBFs) have the potential to improve filter performance and lower risk and cost for future x-ray imaging spectroscopy missions. However, they have not been fully characterized on high-performance charge coupled devices (CCDs). This paper reports the results of DD OBFs processed on high-performance photon-counting CCDs...

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Germanium CCDs for large-format SWIR and x-ray imaging

Summary

Germanium exhibits high sensitivity to short-wave infrared (SWIR) and X-ray radiation, making it an interesting candidate for imaging applications in these bands. Recent advances in germanium processing allow for high-quality charge-coupled devices (CCDs) to be realized in this material. In this article, we discuss our evaluation of germanium as an absorber material for CCDs via fabrication and analysis of discrete devices such as diodes, metal-insulator-semiconductor capacitors, and buried-channel metal-oxide-semiconductor field-effect transistors (MOSFETs). We then describe fabrication of our first imaging device on germanium, a 32 x 1 x 8.1 um linear shift register. Based on this work, we find that germanium is a promising material for CCDs imaging in the SWIR and X-ray bands.
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Summary

Germanium exhibits high sensitivity to short-wave infrared (SWIR) and X-ray radiation, making it an interesting candidate for imaging applications in these bands. Recent advances in germanium processing allow for high-quality charge-coupled devices (CCDs) to be realized in this material. In this article, we discuss our evaluation of germanium as an...

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Directly-deposited blocking filters for high-performance silicon x-ray detectors

Published in:
SPIE, Vol. 9905, Space Telescopes and Instrumentation 2016: Ultraviolet to Gamma Ray, July 2016, 99054C.

Summary

Silicon X-ray detectors often require blocking filters to mitigate noise and out-of-band signal from UV and visible backgrounds. Such filters must be thin to minimize X-ray absorption, so direct deposition of filter material on the detector entrance surface is an attractive approach to fabrication of robust filters. On the other hand, the soft (E < 1 keV) X-ray spectral resolution of the detector is sensitive to the charge collection efficiency in the immediate vicinity of its entrance surface, so it is important that any filter layer is deposited without disturbing the electric field distribution there. We have successfully deposited aluminum blocking filters, ranging in thickness from 70 to 220nm, on back-illuminated CCD X-ray detectors passivated by means of molecular beam epitaxy. Here we report measurements showing that directly deposited filters have little or no effect on soft X-ray spectral resolution. We also find that in applications requiring very large optical density (> OD 6) care must be taken to prevent light from entering the sides and mounting surfaces of the detector. Our methods have been used to deposit filters on the detectors of the REXIS instrument scheduled to fly on OSIRIS-ReX later this year.
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Summary

Silicon X-ray detectors often require blocking filters to mitigate noise and out-of-band signal from UV and visible backgrounds. Such filters must be thin to minimize X-ray absorption, so direct deposition of filter material on the detector entrance surface is an attractive approach to fabrication of robust filters. On the other...

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Enhancing the far-ultraviolet sensitivity of silicon complementary metal oxide semiconductor imaging arrays

Summary

We report our progress toward optimizing backside-illuminated silicon P-type intrinsic N-type complementary metal oxide semiconductor devices developed by Teledyne Imaging Sensors (TIS) for far-ultraviolet (UV) planetary science applications. This project was motivated by initial measurements at Southwest Research Institute of the far-UV responsivity of backside-illuminated silicon PIN photodiode test structures, which revealed a promising QE in the 100 to 200 nm range. Our effort to advance the capabilities of thinned silicon wafers capitalizes on recent innovations in molecular beam epitaxy (MBE) doping processes. Key achievements to date include the following: (1) representative silicon test wafers were fabricated by TIS, and set up for MBE processing at MIT Lincoln Laboratory; (2) preliminary far-UV detector QE simulation runs were completed to aid MBE layer design; (3) detector fabrication was completed through the pre-MBE step; and (4) initial testing of the MBE doping process was performed on monitoring wafers, with detailed quality assessments.
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Summary

We report our progress toward optimizing backside-illuminated silicon P-type intrinsic N-type complementary metal oxide semiconductor devices developed by Teledyne Imaging Sensors (TIS) for far-ultraviolet (UV) planetary science applications. This project was motivated by initial measurements at Southwest Research Institute of the far-UV responsivity of backside-illuminated silicon PIN photodiode test structures...

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Development of CCDs for REXIS on OSIRIS-REx

Summary

The Regolith x-ray Imaging Spectrometer (REXIS) is a coded-aperture soft x-ray imaging instrument on the OSIRIS-REx spacecraft to be launched in 2016. The spacecraft will fly to and orbit the near-Earth asteroid Bennu, while REXIS maps the elemental distribution on the asteroid using x-ray fluorescence. The detector consists of a 2x2 array of back-illuminated 1kX1k frame transfer CCDs with a flight heritage to Suzaku and Chandra. The back surface has a thing p+-doped layer deposited by molecular-beam epitaxy (MBE) for maximum quantum efficiency and energy resolution at low x-ray energies. The CCDs also feature an integrated optical-blocking filter (OBF) to suppress visible and near-infrared light. The OBF is an aluminum film deposited directly on the CCD back surface and is mechanically more robust and less absorptive of x-rays than the conventional free-standing aluminum-coated polymer films. The CCDs have charge transfer inefficiencies of less than 10^-6, and dark current of le-/pixel/second at the REXIS operating temperature of -60 degrees C. The resulting spectral resolution is 115 eV at 2 KeV. The extinction ratio of the filter is ~10^12 at 625 nm.
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Summary

The Regolith x-ray Imaging Spectrometer (REXIS) is a coded-aperture soft x-ray imaging instrument on the OSIRIS-REx spacecraft to be launched in 2016. The spacecraft will fly to and orbit the near-Earth asteroid Bennu, while REXIS maps the elemental distribution on the asteroid using x-ray fluorescence. The detector consists of a...

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